Optimization of ALD Beryllium Oxide as a Potential High-K Dielectric for Low-Leakage Ge transistor
Sangoh Han, Dohwan Jung, Jonghyun Bae, Haekyun Bong, Juyoung chae, Christopher W. Bielawski, and Jungwoo Oh, 2024 Asia-Pacific Workshop on Advanced Semiconductor Devices (AWAD 2024)